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Denka六硼化镧灯丝(LaB6 Cathodes)

    标准Denka M-3型六硼化镧灯丝Standard Denka Model 3 LaB6 Cathodes,在SEMTEMX-RayElectron Beam Lithography等领域应用,六硼化镧都是最佳的阴极材料。

 

特征:

l  低干扰

l  熔点高、热稳定性好

l  低蒸发压,减少材料损失

l  化学性质稳定

l  亮度高,10倍于钨丝亮度,Denka M-3初始亮度值1 x 106 A/cm2

l  寿命长,温度和真空决定灯丝的使用寿命。在1550°C 10-7 Torr时,M-3的使用寿命在500小时。

l  安装方便

 

标准灯丝一般有三种形状:

l  标准尖Standard Tips,也即90°圆锥体/圆尖,,半径15µ

l  平尖Flat (Truncated) Tips,圆锥体截去顶端。平尖是优先选择的,稳定性和使用寿命是我们的主要考虑因素,亮度有时需要做出一点牺牲。平尖有两种角度的椎体90°和60°,多种半径尺寸可供选择。

l  尖尖Sharp Tips,也即60°圆锥体/圆尖,半径有10µ,当需要很高的初始亮度而使用寿命暂不考虑时,尖尖就是最佳选择。

 

 性能参数:

 

标准尖Standard Tips

平尖Flat Tips

尖尖Sharp Tips

Brightness

About 10 times that of tungsten,
1x106 A/cm2
· Str

About 5 times that of tungsten,
2-5x105 A/cm2
· Str

Twice as bright as standard tips
2x106 A/cm2
· Str

Saturation

Mono spot at about 1,500°C.

Mono spot at about 1,400°C

Almost the same as standard tips

Crossover

Small (7-10µ)

Large (11-13µ)

Small (7-10µ)

Angular distribution

Sharp1.6 x10-2 rad

Broad, 3.3-4.2x10-2 rad

Sharp1.6 x10-2 rad

Used Temperature

Low temperature

Low temperature

High temperature.

Lifetime

Long life but shorter than flat tips.

Long life; usable at low temperatures and crystallized end changes slowly.

Short

Operation

Not so difficult.

Easy; thanks to its large spot size and broad adjusting range.

Difficult; Point adjustment needed!

Stability

High

High; vulnerable to thermal expansion or vibration.

Middle;. Vulnerable to the thermal expansion or vibration. Adjustment is sometimes necessary.

Technology Needed

High

Ordinary

Very high

 

订购信息: 

货号

产品描述

规格

80900-05

Denka M-3 LaB6 Standard for JEOL 60-5UM

80900-10

Denka M-3 LaB6 Standard for JEOL 60-10UM

80900-11

Denka M-3 LaB6 Standard for JEOL 90-20UM

80900-20

Denka M-3 LaB6 Standard for JEOL 60-20UM

80900-21

Denka M-3 LaB6 Standard for JEOL 90-21UM

80900-40

Denka M-3 LaB6 Standard for JEOL 60--40UM

80900-41

Denka M-3 LaB6 Standard for JEOL 90-41UM

80900-60

Denka M-3 LaB6 Standard for JEOL 60-60UM

80900-61

Denka M-3 LaB6 Standard for JEOL 90-60UM

80900-80

Denka M-3 LaB6 Standard for JEOL 60-80UM

80900-100

Denka M-3 LaB6 Standard for JEOL 60-100UM

80900-101

Denka M-3 LaB6 Standard for JEOL 90-100UM

80900-05

Denka M-3 LaB6 Standard for JEOL JEOL 60-5UM

80904-5

Denka M-3 LaB6 Standard for KF SHARP 60-5UM

80904-10

Denka M-3 LaB6 Standard for KF SHARP 60-10UM

80904-20

Denka M-3 LaB6 Standard for KF FLAT TIP 60-20UM

80904-21

Denka M-3 LaB6 Standard for KF FLAT TIP 90-20UM

80904-40

Denka M-3 LaB6 Standard for KF FLAT TIP 60-40UM

80904-41

Denka M-3 LaB6 Standard for KF FLAT TIP 90-40UM

80904-60

Denka M-3 LaB6 Standard for KF FLAT TIP 60-60UM

80904-61

Denka M-3 LaB6 Standard for KF FLAT TIP 90--60UM

80904-80

Denka M-3 LaB6 Standard for KF FLAT TIP 60-80UM

80904-81

Denka M-3 LaB6 Standard for KF FLAT TIP 90-80UM

80904-100

Denka M-3 LaB6 Standard for KF FLAT TIP 60-100UM

80904-101

Denka M-3 LaB6 Standard for KF FLAT TIP 90-100UM

80906-5

Denka M-3 LaB6 Standard for CAMBRIDGE 60-5UM

80906-10

Denka M-3 LaB6 Standard for CAMBRIDGE 60-10UM

80906-11

Denka M-3 LaB6 Standard for CAMBRIDGE 90-20UM

80906-20

Denka M-3 LaB6 Standard for CAMBRIDGE 60-20UM

80906-21

Denka M-3 LaB6 Standard for CAMBRIDGE 90-40UM

80906-40

Denka M-3 LaB6 Standard for CAMBRIDGE 60-40UM

80906-41

Denka M-3 LaB6 Standard for CAMBRIDGE 90-60UM

80906-60

Denka M-3 LaB6 Standard for CAMBRIDGE 60-60UM

80906-61

Denka M-3 LaB6 Standard for CAMBRIDGE 90-80UM

80906-80

Denka M-3 LaB6 Standard for CAMBRIDGE 60-80UM

80906-81

Denka M-3 LaB6 Standard for CAMBRIDGE 60-100UM

80906-100

Denka M-3 LaB6 Standard for CAMBRIDGE 60-100UM

80908-5

Denka M-3 LaB6 Standard for HITACHI 60-5UM

80908-10

DENKA M3-H2 LAB6 FOR HITACH 60-10UM

80908-11

DENKA M3-H2 LAB6 FOR HTIACHI 90-20UM

80908-20

DENKA M3-H2 LAB6 FOR HITACHI 60-20UM

80908-21

DENKA M3-H2 LAB6 FOR HITACHI 90-40UM

809098-40

DENKA M3-H2 LAB6 FOR HITACHI 60-40UM

80908-41

DENKA M3-H2 LAB6 FOR HITACHI 90-60UM

80908-60

DENKA M3-H6 LAB6 FOR HITACHI 60-60UM

80908-61

DENKA M3-H2 LAB 6 FOR HITACHI 90-60UM

80908-80

DENKA M3-H6 LAB6 FOR HITACHI 60-80UM

80908-81

DENKA M3-H2 LAB6 FOR HITACHI 90-100UM

80908-100

DENKA M3-H6 LAB6 FOR HITACHI 60-100UM

80908-10

DENKA M3-H2 LAB6 FOR HITACH 60-10UM

 

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