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扫描电镜线宽标样

    扫描电镜测长物质常见的有两种,一种线宽标准物质(300nm型,下图前者),一种粒度标准物质(700nm型,下图后者)。线宽标准物质以单晶硅为基底,表面刻制金属膜(钨或者钛)。周期性的线宽标准物质主要用于校准扫描电镜放大倍率和进行长度的比对。

l  安装在样品台上,快速核对空间尺寸

l  定期进行显微镜的刻度和性能检查

l  第一时间获得高放大倍率和纳米尺寸

l  精确获得从0.3um30um的尺寸,仅用一个刻度参照物

l  分析变形失真原因

 

产品信息: 

 

301CE & 701CE

302CE & 702CE

301BE

Substrate

Silicon Wafer

Silicon Wafer

Silicon Wafer

Top Surface

60 nm Tungsten film

60 nm Tungsten film

Ti pattern on Si

Physical Size

3mm x 4mm x 0.5mm

3mm x 4mm x 0.5mm

3mm x 4mm x 0.5mm

Accuracy

± 3%

± 3%

± 1%

Nominal Dimensions

(x)

(x, y)

(x)

300 nm for 301CE

300 nm for 302CE

300 nm for 301BE

700 nm for 701CE

700 nm for 702CE

 

Availability

mounted or unmounted*

mounted or unmounted*

mounted or unmounted*

 

订购信息:

货号

产品名称

规格

80110-31

MODEL 301CE SUBMICRON STANDARD UNMOUNTED

80110-31M

MODEL 301CE SUBMICRON STANDARD - MOUNTED

80110-31-PIN

MODEL 301CE WITH PIN

80110-32

MODEL 302CE SUBMICRON STANDARD-UNMOUNTED

80110-32M

MODEL 302CE SUBMICRON STANDARD - MOUNTED

80110-32-PIN

MODEL 302CE WITH PIN

80110-71

MODEL 701CE  SUBMICRON  STANDARD, UNMOUNTED

80110-71M

MODEL 701CE SUBMICRON STANDARD-MOUNTED

80110-71-PIN

MODEL 701CE WITH PIN

80110-72

MODEL 702CE SUBMICRON STANDARD,UNMOUNTED

80110-72M

MODEL 702CE SUBMICRON STANDARD-MOUNTED

80110-72-PIN

MODEL 702CE WITH PIN

80111-31

MODEL 301BE SUBMICRON STANDARD-UNMOUNTED

80111-31M

MODEL 301BE SUBMICRON STANDARD - MOUNTED

80111-31-PIN

MODEL 301BE WITH PIN

 

 

 

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